Inert Gas Pumps | McMaster-Carr

Filter by

For Use With

Power Source

Voltage

Maximum Vacuum

20 in. Hg to 24.9 in. Hg

NEMA Style

Maximum Flow Rate

Maximum Vacuum @ Temperature

18 in. Hg @ 72° F

27 in. Hg @ 72° F

1× 10^-12 Torr @ 72° F

1× 10^-8 Torr @ 72° F

1× 10^-4 Torr @ 72° F

1× 10^-2 Torr @ 72° F

Frequency

Power

Intake Port Size

Intake Connection Port

Intake Connection

Pump Type

Current

Discharge Pipe Size

Electrical Phase

Discharge Connection

Housing Material

Intake Tube ID

Intake Pipe Size

Overall Height

Volume (Sound)

RoHS

Export Control Classification Number (ECCN)

REACH

DFARS Specialty Metals

Exempt

Forward

How can we improve?

41 Products

About Vacuum Pumps

Since these pumps don't require lubrication, there’s no risk of oil contamination. Maximum flow rate is the rate at which air is pumped before a vacuum is created. Flow rate steadily decreases as the pump generates the vacuum. The larger the tank, the longer it will take to form a vacuum.

Style A pumps are often used for air and gas sampling, controlling compressed air flow, and vacuum filtration. They are also suitable for pressure applications up to 18 psi.

120V AC, Single Phase—With Thermal Overload Protection

								Intake		Discharge		O'all
Style	Max. Vacuum, in. of Hg	Max. Flow Rate, cfm	Max. Pressure, psi	Temp. Range, °F	Volume, dB	Horsepower	Current, A	Connection Style	For Tube ID	Connection Style	For Tube ID	Lg.	Wd.	Ht.		Each
NEMA 5-15 Plug
A	20	0.6	18	35° to 100°	72	1/45 hp	1.2	Barbed	3/8"	Barbed	3/8"	7 1/4"	4"	5 1/2"	00000000	0000000

Oil-Free Electric High-Vacuum Pumps

Connect these pumps to a vacuum chamber to create high levels of vacuum—just plug them in and they’re ready to go. Since they don’t use oil, they won’t introduce contaminants into your system. They barely vibrate, which prevents interference with sensitive instruments and measurement devices. These pumps are small enough to fit on a workbench or table. They include both a diaphragm pump and a turbomolecular pump. The turbomolecular pump meets IP54 for protection in damp and dusty environments.

Pumps with claw-clamp intake connections (ISO-K) are rated for high-vacuum chambers. You’ll need a ring and four double-claw clamps (all sold separately) to connect them to other components. They include a gauge with quick-clamp (KF) connections, so you’ll also need a quick clamp and a ring (both sold separately) to connect it to your chamber.

Pumps with flanged intake connections (CF) are rated for ultra-high-vacuum chambers. You’ll need two gaskets (sold separately) to connect to your chamber: one for the intake and one for the included gauge.

Pumps with Thermal Overload Protection—Three-Prong Plug

				Intake Connection				Gauge Port Connection				Discharge Connection (BSPP Threads)		O'all
Max. Vacuum	Max. Flow Rate, cfm	Volume, dBA	Current, A	For Tube OD	Flange OD	High-Vacuum Flange Size	High Vacuum Connection Type	For Tube OD	Flange OD	High-Vacuum Flange Size	High Vacuum Connection Type	Pipe Size	Gender	Ht.	Wd.		Each
Claw-Clamp Intake Connection—High Vacuum Rating
120V AC/240V AC, Single Phase
10 ^-8 torr @ 72° F	142	50	4.6	2 1/2"	3 3/4"	63	ISO-K	1"	1.57"	25	ISO-KF	1/8	Male	13 5/8"	11 7/8"	000000	000000000
Flanged Intake Connection—Ultra-High Vacuum Rating
120V AC/240V AC, Single Phase
10 ^-12 torr @ 72° F	142	50	4.6	2 1/2"	4 1/2"	63	CF	1 1/2"	2 3/4"	40	CF	1/8	Male	13 7/8"	11 7/8"	000000	00000000

Clamps for Pumps with Claw-Clamp Intake Connection

Double-Claw with Bolt

Clamp with Wing Nut

For Claw-Clamp Intake Connection—Double-Claw with Bolt
For Tube OD	For Flange OD	For High-Vacuum Flange Size	High Vacuum Connection Type	Material	Max. Vacuum		Each
2 1/2", 3", 4"	3.74", 4.33", 5.12"	63, 80, 100	ISO-K	Aluminum	10 ^-8 torr @ 72° F	0000000	00000
For Quick-Clamp Gauge Connection—Clamp with Wing Nut
1"	1.57"	25	ISO-KF	Aluminum	10 ^-8 torr @ 72° F	0000000	00000

Rings for Pumps with Claw-Clamp Intake Connection

				Material
For Tube OD	For Flange OD	For High-Vacuum Flange Size	High Vacuum Connection Type	O-Ring	Inner Ring	Max. Vacuum	Max. Temp., °F		Each
For Claw-Clamp Intake Connection
2 1/2"	3.74"	63	ISO-K	Viton® Fluoroelastomer Rubber	304 Stainless Steel	10 ^-8 torr @ 72° F	400°	0000000	000000
For Quick-Clamp Gauge Connection
1"	1.57"	25	ISO-KF	Viton® Fluoroelastomer Rubber	304 Stainless Steel	10 ^-8 torr @ 72° F	300°	0000000	00000

Gaskets for Pumps with Flanged Intake Connection

For Tube OD	For Flange OD	Gasket Material	Specifications Met		Each
1 1/2"	2 3/4"	Copper	ASTM F68	0000000	00000
2 1/2"	4 1/2"	Copper	ASTM F68	0000000	0000

Electric Vacuum Pumps


	NEMA 5-15
	NEMA 6-15

Use these pumps in applications such as degassing and servicing refrigeration and freezer systems. Maximum flow rate is the rate at which air is pumped before a vacuum is created. Flow rate steadily decreases as the pump generates the vacuum. The larger the tank, the longer it will take to form a vacuum. Tube and fitting ID will also affect flow.

						Intake			Discharge			Overall
Max. Vacuum	Max. Flow Rate, cfm	Temp. Range, °F	Volume, dBA	Horsepower	Current, A	Port Size	Tube Connection Type	Gender	Pipe Size	Thread Type	Gender	Lg.	Wd.	Ht.	Oil Capacity, oz.		Each
115V AC, Single Phase—With Thermal Overload Protection
NEMA 5-15 Plug
10 ^-2 torr @ 72° F	3	30° to 180°	70	1/2 hp	7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	27	0000000	0000000
10 ^-2 torr @ 72° F	5	30° to 180°	70	1/2 hp	7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	21	0000000	000000
10 ^-2 torr @ 72° F	7	30° to 180°	70	1/2 hp	7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	23	0000000	000000
10 ^-2 torr @ 72° F	10	30° to 180°	70	1/2 hp	7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	26	0000000	000000
115V AC/230V AC, Single Phase—With Thermal Overload Protection
NEMA 6-15 Plug
10 ^-2 torr @ 72° F	3	30° to 180°	70	1/2 hp	3.5/7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	27	0000000	000000
10 ^-2 torr @ 72° F	5	30° to 180°	70	1/2 hp	3.5/7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	21	0000000	000000
10 ^-2 torr @ 72° F	7	30° to 180°	70	1/2 hp	3.5/7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	14 1/2"	5 5/8"	12"	21	0000000	000000
10 ^-2 torr @ 72° F	10	30° to 180°	70	1/2 hp	3.5/7	1/4", 3/8", 1/2"	Flared	Male	1/2	NPT	Male	16"	5 5/8"	12"	26	0000000	000000

Electric High-Vacuum Pumps

Barbed Intake Connection

Achieve powerful vacuum and continuous flow for applications such as vacuum drying, solvent evaporation, and distillation. Maximum flow rate is the rate at which air is pumped before a vacuum is created. Flow rate steadily decreases as the pump generates the vacuum. The larger the tank, the longer it will take to form a vacuum. Tube and fitting ID will also affect flow.

						Intake				Overall
Max. Vacuum	Max. Flow Rate, cfm	Temp. Range, °F	Volume, dBA	Horsepower	Current, A	Connection Style	Gender	For Tube ID	Discharge Connection Style	Lg.	Wd.	Ht.	Oil Capacity, qt.		Each
120V AC, Single Phase—Without Thermal Overload Protection
NEMA 5-15 Plug
10 ^-4 torr @ 72° F	0.9	50° to 100°	54	1/3 hp	5	Barbed	Male	7/16"	Open Outlet	17 7/8"	9"	12 5/8"	0.63	0000000	000000000
10 ^-4 torr @ 72° F	3.2	50° to 100°	54	1/2 hp	7	Barbed	Male	7/16"	Open Outlet	20"	12"	15"	2.25	0000000	00000000
10 ^-4 torr @ 72° F	5.6	50° to 100°	54	1/2 hp	7	Barbed	Male	13/16"	Open Outlet	20"	12"	15"	2.25	0000000	00000000

Robot-Arm-Mounted Electric Vacuum Pumps

Generate the suction you need to power end-of-arm tools, such as vacuum cups and grippers, without using an installed vacuum system. These pumps, also known as venturi devices, connect to any compressed air source and come with all the electrical connections you need to start lifting or moving objects. They’re curved and have a foam mounting pad that fits collaborative robot arms. Use the hook-and-loop straps to secure them in place—close to your tools, but out of the way.

These pumps have a vacuum switch that uses analog and PNP digital feedback to send information about the pump’s vacuum level to your controller. The switch has an LED display that shows the vacuum setting and status. Push buttons on the pump let you set and change the vacuum setting. An integrated solenoid valve controls the air flow to your tools.

Vacuum pumps with a discharge tube have an additional integrated solenoid valve that creates a burst of air for removing parts that may not drop when the air flow stops, such as those with adhesive on them.

Vacuum pumps with M8 plug will work with FANUC CRX and Universal Robots models. They include a USB flash drive with software for Universal Robots, called URCap, that plugs into your teach pendant to program the pump.

Vacuum Pumps

Vacuum Pump with Wire Leads

LED Display

Vacuum Pump with M8 Plug

						Intake, Push to Connect		Vacuum Connection, Push to Connect		O'all
Max. Vacuum	Max. Flow Rate, cfm	Operating Pressure, psi	Temp. Range, °F	Volume, dBA	Current, A	Tube OD, mm	Gender	Tube OD, mm	Gender	Lg.	Ht.	For Robot Arm Manufacturer (Series/Model No.)		Each
24V DC, Single Phase
With Wire Leads
27 in. of Hg @ 72° F	5	120	0° to 120°	70	0.17	6	Female	6	Female	4 3/8"	5 5/8"	__	0000000	0000000
With M8 Plug
27 in. of Hg @ 72° F	5	120	0° to 120°	70	0.17	6	Female	6	Female	4 3/8"	5 5/8"	FANUC (CRX 5iA, 10iA, 10iA/L, 20iA/L, 25iA) Universal Robots (UR3; UR3e; UR5; UR5e; UR10; UR10e; UR16; UR16e)	0000000	000000

Vacuum Pumps with Discharge Tube

Vacuum Pump with Discharge Tube and Wire Leads

LED Display

Vacuum Pump with Discharge Tube and M8 Plug

						Intake, Push to Connect		Discharge, Push to Connect		Vacuum Connection, Push to Connect		O'all
Max. Vacuum	Max. Flow Rate, cfm	Operating Pressure, psi	Temp. Range, °F	Volume, dBA	Current, A	Tube OD, mm	Gender	Tube OD, mm	Gender	Tube OD, mm	Gender	Lg.	Ht.	For Robot Arm Manufacturer (Series/Model No.)		Each
24V DC, Single Phase
With Wire Leads
18 in. of Hg @ 72° F	5	120	0° to 120°	74	0.17	6	Female	6	Female	10	Female	4 3/8"	7"	__	0000000	0000000
With M8 Plug
18 in. of Hg @ 72° F	5	120	0° to 120°	74	0.17	6	Female	6	Female	10	Female	4 3/8"	7"	FANUC (CRX 5iA, 10iA, 10iA/L, 20iA/L, 25iA) Universal Robots (UR3; UR3e; UR5; UR5e; UR10; UR10e; UR16; UR16e)	0000000	000000

Steam-Powered Jet Pumps

Use plant steam to pump liquids and gases, prime pumps, and remove fumes. When high-pressure steam enters the intake, it creates suction that draws a second liquid or gas into the pump body and discharges a pressurized blend of the two. The discharge pressure is greater than the suction flow but lower than the intake pressure. Gas suction flow is calculated using steam at atmospheric pressure. They have no moving parts or seals, eliminating downtime for lubrication and repairs. They're also known as eductors, ejectors, and injectors.

Note: Liquid suction flow rate is calculated using 80 psi steam at 0-40 feet of discharge head.

Bronze is more corrosion resistant than steel.

316 stainless steel pumps provide the most corrosion resistance.

Liquid Suction Flow Rate, gpm			Gas Suction Flow, cfm				Intake Pressure, psi			Suction		Intake		Discharge		Overall
@ 5 ft. of Lift	10 ft. of Lift	@ 20 ft. of Lift	@ 20 psi Steam	@ 50 psi Steam	@ 80 psi Steam	Max. Suction Lift, ft.	For Liquids	For Gases	Temp. Range, °F	Pipe Size	Thread Type	Pipe Size	Thread Type	Pipe Size	Thread Type	Lg.	Wd.		Each
For Use With Air, Inert Gas, Steam, Water
Steel
6	5	3	5	4	3	20	35-150	20-80	-20° to 150°	1/2	NPT	3/8	NPT	1/2	NPT	4 1/2"	1 1/8"	0000000	0000000
10	9	5	8	6	6	20	35-150	20-80	-20° to 150°	3/4	NPT	1/2	NPT	3/4	NPT	5 7/8"	1 1/4"	0000000	000000
17	15	9	14	11	10	20	35-150	20-80	-20° to 150°	1	NPT	3/4	NPT	1	NPT	7 1/8"	1 3/4"	0000000	000000
31	27	15	24	20	17	20	35-150	20-80	-20° to 150°	1 1/4	NPT	1	NPT	1 1/4	NPT	9"	2 3/8"	0000000	000000
51	44	25	40	32	28	20	35-150	20-80	-20° to 150°	1 1/2	NPT	1	NPT	1 1/2	NPT	11"	2 5/8"	0000000	000000
93	80	46	73	58	51	20	35-150	20-80	-20° to 150°	2	NPT	1 1/4	NPT	2	NPT	14 3/8"	3 1/2"	0000000	000000
Bronze
6	5	3	5	4	3	20	35-150	20-80	-20° to 150°	1/2	NPT	3/8	NPT	1/2	NPT	4 1/2"	1 1/8"	0000000	000000
10	9	5	8	6	6	20	35-150	20-80	-20° to 150°	3/4	NPT	1/2	NPT	3/4	NPT	5 7/8"	1 1/4"	0000000	000000
17	15	9	14	11	10	20	35-150	20-80	-20° to 150°	1	NPT	3/4	NPT	1	NPT	7 1/8"	1 3/4"	0000000	000000
31	27	15	24	20	17	20	35-150	20-80	-20° to 150°	1 1/4	NPT	1	NPT	1 1/4	NPT	9"	2 3/8"	0000000	000000
51	44	25	40	32	28	20	35-150	20-80	-20° to 150°	1 1/2	NPT	1	NPT	1 1/2	NPT	11"	2 5/8"	0000000	000000
93	80	46	73	58	51	20	35-150	20-80	-20° to 150°	2	NPT	1 1/4	NPT	2	NPT	14 3/8"	3 1/2"	0000000	000000
316 Stainless Steel
6	5	3	5	4	3	20	35-150	20-80	-150° to 150°	1/2	NPT	3/8	NPT	1/2	NPT	4 1/2"	1 1/8"	0000000	000000
10	9	5	8	6	6	20	35-150	20-80	-150° to 150°	3/4	NPT	1/2	NPT	3/4	NPT	5 7/8"	1 1/4"	0000000	000000
17	15	9	14	11	10	20	35-150	20-80	-150° to 150°	1	NPT	3/4	NPT	1	NPT	7 1/8"	1 3/4"	0000000	000000
51	44	25	40	32	28	20	35-150	20-80	-150° to 150°	1 1/2	NPT	1	NPT	1 1/2	NPT	11"	2 5/8"	0000000	00000000
93	80	46	73	58	51	20	35-150	20-80	-150° to 150°	2	NPT	1 1/4	NPT	2	NPT	14 3/8"	3 1/2"	0000000	00000000