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Clean Room Pressure-Regulating Valves for Water, Air, and Inert Gas
- For Use With: Deionized Water, Air, Nitrogen, Oxygen
- Temperature Range: 41° to 140° F
To maintain contaminant-free standards in clean room environments, these valves come cleaned and bagged to Fed. Std. Class 100 and ISO Class 5 clean room standards and have a 316 stainless steel body with a smooth finish to resist dust collection. They automatically reduce a high, variable inlet pressure to a lower, stable output pressure. Adjust the outlet pressure within the range. Valves are no-bleed style, so they keep process media contained within the valve.
For technical drawings and 3-D models, click on a part number.
Inlet | Outlet | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| Thread Size | Location | Max. Pressure, psi | Thread Size | Location | Pressure Range, psi | End-to-End Lg. | Environmental Rating | Each | |
Metric Female | |||||||||
316 Stainless Steel Body—Fluoroelastomer Diaphragm and 316 Stainless Steel Seal | |||||||||
| M5 × 0.8 mm | Side | 150 | M5 × 0.8 mm | Side | 1.4 to 28 | 1 3/16" | Fed. Std. Class 100, ISO Class 5 | 00000000 | 0000000 |
| M5 × 0.8 mm | Side | 150 | M5 × 0.8 mm | Side | 7 to 99 | 1 3/16" | Fed. Std. Class 100, ISO Class 5 | 00000000 | 000000 |
Clean Room Panel-Mount Pressure-Regulating Valves for Air and Inert Gas
- For Use With:
Relieving: Air, Nitrogen
Nonrelieving: Air, Argon, Carbon Dioxide, Nitrogen - Temperature Range: 32° to 140° F
Maintain contaminant-free standards in clean room environments. These valves come cleaned and bagged to Fed. Spec. Class 100 and ISO Class 5 clean room standards and have a 316 stainless steel body with a smooth finish to resist dust collection. They automatically reduce a high, variable inlet pressure to a lower, stable output pressure. Valves have threads below the adjustment knob and come with a panel-mount nut. Adjust the outlet pressure within the range.
Gauge ports let you attach a pressure gauge.
Relieving valves exhaust when the downstream pressure exceeds the set pressure.
Nonrelieving valves do not exhaust excess downstream pressure.
For technical drawings and 3-D models, click on a part number.
Regulators | ||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Inlet | Outlet | Gauge Port | Mounting Brackets | |||||||||||
| Pipe Size  | Location | Max. Pressure, psi | Pipe Size | Location | Pressure Range, psi | Pipe Size | Location | End-to-End Lg. | Panel Cutout Dia. | Environmental Rating | Each | Each | ||
Relieving | ||||||||||||||
NPT Female | ||||||||||||||
316 Stainless Steel Body—Fluoroelastomer Diaphragm and Seal | ||||||||||||||
| 1/8 | Side | 145 | 1/8 | Side | 7 to 102 | 1/4 | Side | 1.700" | 1.2" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 0000000 | 0000000 | 00000 |
| 1/4 | Side | 145 | 1/4 | Side | 7 to 102 | 1/4 | Side | 1.700" | 1.2" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 0000 |
| 1/4 | Side | 145 | 1/4 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
| 3/8 | Side | 145 | 3/8 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
| 1/2 | Side | 145 | 1/2 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
Nonrelieving | ||||||||||||||
NPT Female | ||||||||||||||
316 Stainless Steel Body—Fluoroelastomer Diaphragm and Seal | ||||||||||||||
| 1/8 | Side | 145 | 1/8 | Side | 7 to 102 | 1/4 | Side | 1.700" | 1.2" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 0000 |
| 1/4 | Side | 145 | 1/4 | Side | 7 to 102 | 1/4 | Side | 1.700" | 1.2" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 0000 |
| 1/4 | Side | 145 | 1/4 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
| 3/8 | Side | 145 | 3/8 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
| 1/2 | Side | 145 | 1/2 | Side | 7 to 102 | 1/4 | Side | 2.280" | 1.44" | Fed. Std. Class 100, ISO Class 5 | 0000000 | 000000 | 0000000 | 00000 |
| Pressure Gauge | 0000000 | Each | 000000 |
Clean Room Compressed Air Regulators
Cleaned and double bagged in an ISO Class 3 and Fed. Spec. Class 1 clean room for protection from contamination, these regulators are suitable for use in clean rooms. Use them in semiconductor and food-processing applications to adjust and maintain the pressure of your compressed air. All are relieving style, so they exhaust when the downstream pressure exceeds the set pressure. Install in your air line after filters.
Pipe Size | Overall | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Inlet | Outlet | Max. Flow Rate | Max. Pressure, psi | Gauge Included | Wd. | Ht. | Max. Temp., °F | Environmental Rating | Includes | Regulating Accuracy | Pressure Regulating Range, psi | Each | |
Aluminum Housing | |||||||||||||
NPT Female Inlet and Outlet | |||||||||||||
| 1/8 | 1/8 | 28 scfm @ 100 psi | 145 | Yes | 1 9/16" | 3 11/16" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±2.9% | 7.25-123 | 0000000 | 000000 |
| 1/4 | 1/4 | 53 scfm @ 100 psi | 145 | Yes | 2 1/8" | 4" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±3% | 7.25-123 | 0000000 | 00000 |
| 3/8 | 3/8 | 53 scfm @ 100 psi | 145 | Yes | 2 1/8" | 4 5/8" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±3% | 7.25-123 | 0000000 | 00000 |
| 1/2 | 1/2 | 106 scfm @ 100 psi | 145 | Yes | 2 3/4" | 5" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±3% | 7.25-123 | 0000000 | 00000 |
| 3/4 | 3/4 | 177 scfm @ 100 psi | 145 | Yes | 3" | 5 1/8" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±3% | 7.25-123 | 0000000 | 000000 |
| 1 | 1 | 353 scfm @ 100 psi | 145 | Yes | 3 3/4" | 6 15/16" | 140° | Fed. Std. Class 1, ISO Class 3 | Mounting Bracket | ±2.9% | 7.25-123 | 0000000 | 000000 |
Clean Room Compressed Air Filter/Regulators for Particle Removal
Assembled, inspected, and packaged in a clean environment, these filter/regulators come sealed in antistatic double bags. The filter and regulator are joined top-to-bottom to fit in the same space as a filter alone. They provide clean compressed air at your required pressure. Filter has a clear bowl so you can see inside to monitor contents. Regulator is relieving style, so it exhausts when the downstream pressure exceeds the set pressure. The drain stays open. To close the drain and maintain the integrity of the clean room, attach a valve or closure (not included).
Filter/Regulators | ||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Pipe Size | Drain | Overall | Replacement Filter Elements | |||||||||||||
| Inlet | Outlet | Max. Flow Rate | Max. Pressure, psi | Removes Particle Size Down To, microns | Pipe Size | Thread Type | Gender | Pressure Regulating Range, psi | Includes | Wd. | Ht. | Environmental Rating | Each | Each | ||
NPT Female Inlet and Outlet | ||||||||||||||||
Polycarbonate Plastic Bowl—Clear with Manual Drain | ||||||||||||||||
| 1/8 | 1/8 | 28 scfm @ 100 psi | 145 | 5 | 1/8 | NPT | Female | 7.25-123 | Mounting Bracket | 2 5/8" | 6 1/2" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 000000 | 000000 | 00000 |
| 1/4 | 1/4 | 53 scfm @ 100 psi | 145 | 5 | 1/4 | NPT | Female | 7.25-123 | Mounting Bracket | 2 1/8" | 8 1/8" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 00000 | 000000 | 0000 |
| 3/8 | 3/8 | 53 scfm @ 100 psi | 145 | 5 | 1/4 | NPT | Female | 7.25-123 | Mounting Bracket | 2 1/8" | 8 1/8" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 00000 | 000000 | 0000 |
| 1/2 | 1/2 | 106 scfm @ 100 psi | 145 | 5 | 1/4 | NPT | Female | 7.25-123 | Mounting Bracket | 3 3/4" | 9 5/8" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 00000 | 000000 | 0000 |
| 3/4 | 3/4 | 141 scfm @ 100 psi | 145 | 5 | 1/4 | NPT | Female | 7.25-123 | Mounting Bracket | 3" | 9 3/4" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 000000 | 000000 | 0000 |
| 1 | 1 | 353 scfm @ 100 psi | 145 | 5 | 1/4 | NPT | Female | 7.25-123 | Mounting Bracket | 3 3/4" | 16 1/2" | Fed. Std. Class 1, ISO Class 3 | 0000000 | 000000 | 0000000 | 00000 |