Clean Room Stepper Motors



Deliver precise, repeatable motion in applications where contamination is a concern, such as semiconductor manufacturing. These motors meet the strictest clean room standards—all components are cleaned and assembled in a clean room and stored in vacuum sealed packaging. Made of treated aluminum, they minimize gas and particle emission in your clean room’s environment. They're often used in vacuum chambers, where low particle emission prevents the vacuum from degrading. Similar to the hands of a clock, the shaft on these stepper motors turns in small, equal increments for smooth motion. When the shaft stops, it holds its position even when a counteracting force is applied to the load. You can control the position of the load without having to configure encoders, sensors, or other position feedback devices. All are bipolar hybrid stepper motors, so the current can flow in both directions. This helps them deliver higher torque, precision, and efficiency than unipolar stepper motors.
Holding torque is the force needed to move the shaft out of position when it’s stationary. When the shaft is in motion, torque generally decreases as speed increases. Use a torque-speed curve to confirm which motor will work for your application. Click on a part number and select “Product Detail” to view the curve for a motor.
Full step increment is the rotation of the shaft from one position to the next. A smaller full step increment means the rotor has more teeth, producing smoother and more precise motion. 1.8° is considered standard.
All motors require a controller and driver (not included).
For technical drawings and 3-D models, click on a part number.
O'all | Shaft | |||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Max. Holding Torque, in.-oz. | Max. Speed, rpm | Max. Current per Phase, A | Full Step Increment | No. of Wire Leads | Lg. | Wd. | Ht. | Dia., mm | Lg., mm | Type | No. of Shafts | Vacuum Rating, Torr | Temp. Range, °F | Environmental Rating | Each | |
NEMA 11 | ||||||||||||||||
10 | 3,250 | 0.67 | 1.8° | 4 | 2.1" | 1.1" | 1.1" | 5 | 18 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 000000000 |
19.5 | 1,550 | 0.67 | 1.8° | 4 | 2.8" | 1.1" | 1.1" | 5 | 18 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
NEMA 17 | ||||||||||||||||
85.4 | 850 | 1.05 | 1.8° | 4 | 2.9" | 1.7" | 1.7" | 5 | 22 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
115.1 | 1,150 | 2 | 1.8° | 4 | 3.3" | 1.7" | 1.7" | 5 | 22 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
NEMA 23 | ||||||||||||||||
181 | 1,300 | 2.8 | 1.8° | 4 | 3.1" | 2.3" | 2.3" | 6 | 21 | D-Profile | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
237 | 2,000 | 4 | 1.8° | 4 | 4" | 2.3" | 2.3" | 6 | 21 | D-Profile | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |