Clean Room Stepper Motors



Deliver precise, repeatable motion in applications where contamination is a concern, such as semiconductor manufacturing. These motors meet the strictest clean room standards—all components are cleaned and assembled in a clean room and stored in vacuum sealed packaging. Made of treated aluminum, they minimize gas and particle emission in your clean room’s environment. They're often used in vacuum chambers, where low particle emission prevents the vacuum from degrading. Similar to the hands of a clock, the shaft on these stepper motors turns in small, equal increments for smooth motion. When the shaft stops, it holds its position even when a counteracting force is applied to the load. You can control the position of the load without having to configure encoders, sensors, or other position feedback devices. All are bipolar hybrid stepper motors, so the current can flow in both directions. This helps them deliver higher torque, precision, and efficiency than unipolar stepper motors.
Holding torque is the force needed to move the shaft out of position when it’s stationary. When the shaft is in motion, torque generally decreases as speed increases. Use a torque-speed curve to confirm which motor will work for your application. Click on a part number and select “Product Detail” to view the curve for a motor.
Full step increment is the rotation of the shaft from one position to the next. A smaller full step increment means the rotor has more teeth, producing smoother and more precise motion. 1.8° is considered standard.
All motors require a controller and driver (not included).
For technical drawings and 3-D models, click on a part number.
O'all | Shaft | |||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Max. Holding Torque, in.-oz. | Max. Speed, rpm | Max. Current per Phase, A | Full Step Increment | No. of Wire Leads | Lg. | Wd. | Ht. | Dia., mm | Lg., mm | Type | No. of Shafts | Vacuum Rating, Torr | Temp. Range, °F | Environmental Rating | Each | |
NEMA 11 | ||||||||||||||||
10 | 3,250 | 0.67 | 1.8° | 4 | 2.1" | 1.1" | 1.1" | 5 | 18 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 000000000 |
19.5 | 1,550 | 0.67 | 1.8° | 4 | 2.8" | 1.1" | 1.1" | 5 | 18 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
NEMA 17 | ||||||||||||||||
85.4 | 850 | 1.05 | 1.8° | 4 | 2.9" | 1.7" | 1.7" | 5 | 22 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
115.1 | 1,150 | 2 | 1.8° | 4 | 3.3" | 1.7" | 1.7" | 5 | 22 | Solid | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
NEMA 23 | ||||||||||||||||
181 | 1,300 | 2.8 | 1.8° | 4 | 3.1" | 2.3" | 2.3" | 6 | 21 | D-Profile | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
237 | 2,000 | 4 | 1.8° | 4 | 4" | 2.3" | 2.3" | 6 | 21 | D-Profile | 1 | 1 × 10-7 | 0° to 120° | ISO Class 1 | 0000000 | 00000000 |
Clean Room Electric Positioning Slides


Prevent dust from circulating while precisely positioning parts for drilling, fastening, assembly, and measuring. These slides have a built-in vacuum port to remove fine particles that could damage electronics or contaminate batches in clean rooms. Because they have an integrated stepper motor with an included controller, you can adjust the speed, timing, and positioning with no extra software required. At ± 0.02 mm, these slides have a repeatability thinner than a single sheet of paper, so the carriage hits the same spot every time. Unlike air-powered actuators, they’ll hold their position even if power fails. They’re also more energy efficient.
Dynamic load capacity is the maximum load slides can move. If you increase the speed, the dynamic load capacity decreases. Use a load-speed chart to confirm which slides will work for your application. Click on a part number and select "Product Detail" to view the chart.
Maximum speed is how fast the slide will move under no-load conditions. If you increase the load, the slide speed will decrease.
Travel distance per full step determines the control you have over the slide’s positioning. The smaller the measurement, the finer positioning control you have.
Travel distance per turn, also known as screw lead, is how far the carriage moves with one rotation of the ball screw.
For technical drawings and 3-D models, click on a part number.
Dynamic Load Cap., lbs. | Travel Distance per | Overall | Carriage | ||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Horizontal | Vertical | Max. Speed, mm/s | Full Step, mm | Turn, mm | Repeatability, mm | Lg., mm | Wd., mm | Ht., mm | Lg., mm | Wd., mm | Bearing Type | Base Material | Full Load Current | Voltage | Environmental Rating | Each | |
200 mm Stroke Length | |||||||||||||||||
110 | 44 | 250 | 0.08 | 8 | ±0.02 | 541 | 70 | 84 | 122 | 60 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 000000000 |
143 | 50 | 250 | 0.1 | 10 | ±0.02 | 614.5 | 90 | 85.5 | 170 | 74 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |
300 mm Stroke Length | |||||||||||||||||
110 | 44 | 250 | 0.08 | 8 | ±0.02 | 641 | 70 | 84 | 122 | 60 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |
400 mm Stroke Length | |||||||||||||||||
110 | 44 | 250 | 0.08 | 8 | ±0.02 | 741 | 70 | 84 | 122 | 60 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |
143 | 50 | 250 | 0.1 | 10 | ±0.02 | 814.5 | 90 | 85.5 | 170 | 74 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |
600 mm Stroke Length | |||||||||||||||||
143 | 50 | 250 | 0.1 | 10 | ±0.02 | 1,014.5 | 90 | 85.5 | 170 | 74 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |
800 mm Stroke Length | |||||||||||||||||
143 | 50 | 250 | 0.1 | 10 | ±0.02 | 1,214.5 | 90 | 85.5 | 170 | 74 | Ball | Aluminum | 5A | 24V DC | Fed. Std. Class 10, ISO Class 4 | 0000000 | 00000000 |