About Vacuum Pumps
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Electric Ultra-High-Vacuum Pumps
Achieve vacuum levels up to 1 x 10 -12 torr with these ultra-high-vacuum pumps. Each unit includes two pumps—a diaphragm pump and a turbomolecular pump—that work together to create extremely high levels of vacuum in your chamber. The turbomolecular pump meets IP54 for protection in damp and dusty environments. Units are compact, so they fit on top of a workbench or table.
Pumps are ready to use as soon as they’re plugged in and connected to a chamber. Since they don’t use oil, they won’t introduce contaminants into your system. They hardly vibrate, minimizing interference with sensitive instruments and measurement devices.
Pumps with claw-clamp intake connections require a ring and four double-claw clamps (all sold separately) to connect to other components. Claw-clamp connections are also known as ISO-K fittings. These pumps include a gauge with quick-clamp connections, which requires a quick clamp and a ring (both sold separately) to connect. Quick-clamp connections are also known as KF fittings.
Pumps with flanged intake connections and the included gauge each require a gasket (sold separately) to connect to your chamber. Flanged connections are also known as CF fittings.
Intake Connection | Gauge Port Connection | Discharge Connection (BSPP Threads) | O'all | ||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Max. Vacuum | Max. Flow Rate, cfm | Volume, dBA | Current, A  | For Tube OD | Flange OD | High-Vacuum Flange Size | High Vacuum Connection Type | For Tube OD | Flange OD | High-Vacuum Flange Size | High Vacuum Connection Type | Pipe Size | Gender | Ht. | Wd. | Each | |
Claw-Clamp Intake Connection—120V AC/240V AC, Single Phase | |||||||||||||||||
| 1 × 10 -8 torr @ 72° F | 142 | 50 | 4.6 | 2 1/2" | 3 3/4" | 63 | ISO-K | 1" | 1.57" | 25 | ISO-KF | 1/8 | Male | 13 5/8" | 11 7/8" | 000000 | 000000000 |
Flanged Intake Connection—120V AC/240V AC, Single Phase | |||||||||||||||||
| 1 × 10 -12 torr @ 72° F | 142 | 50 | 4.6 | 2 1/2" | 4 1/2" | 63 | CF | 1 1/2" | 2 3/4" | 40 | CF | 1/8 | Male | 13 7/8" | 11 7/8" | 000000 | 00000000 |
| For Tube OD | For Flange OD | For High-Vacuum Flange Size | High Vacuum Connection Type | Material | Max. Vacuum | Each | |
For Claw-Clamp Intake Connection—Double-Claw with Bolt | |||||||
|---|---|---|---|---|---|---|---|
| 2 1/2", 3", 4" | 3.74", 4.33", 5.12" | 63, 80, 100 | ISO-K | Aluminum | 1 × 10 -9 torr @ 72° F | 0000000 | 00000 |
For Quick-Clamp Gauge Connection—Clamp with Wing Nut | |||||||
| 1" | 1.57" | 25 | ISO-KF | Aluminum | 1 × 10 -7 torr @ 72° F | 0000000 | 00000 |
Material | |||||||||
|---|---|---|---|---|---|---|---|---|---|
| For Tube OD | For Flange OD | For High-Vacuum Flange Size | High Vacuum Connection Type | O-Ring | Inner Ring | Max. Vacuum | Max. Temp., °F | Each | |
For Claw-Clamp Intake Connection | |||||||||
| 2 1/2" | 3.74" | 63 | ISO-K | Viton® Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -9 torr @ 72° F | 400° | 0000000 | 000000 |
For Quick-Clamp Gauge Connection | |||||||||
| 1" | 1.57" | 25 | ISO-KF | Fluoroelastomer Rubber | 304 Stainless Steel | 1 × 10 -7 torr @ 72° F | 300° | 0000000 | 00000 |
High-Vacuum Flanged Sights
Add a window to your high-vacuum system. With a pane of glass sealed inside a high-vacuum CF flange, these sights bolt onto vacuum chambers, tee fittings, and manifolds. Use a copper gasket (sold separately) to create a seal. Not for use with pressure. To illuminate dark interiors, attach an optional light to the flange with set screws.
For technical drawings and 3-D models, click on a part number.
Window | Bolt Holes | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| High-Vacuum Flange Size | Flange OD | High Vacuum Connection Type | Max. Vacuum | Dia. | Material | Bolt Circle Dia. | No. of | Dia. | Max. Temp., °F | Each | |
304 Stainless Steel | |||||||||||
| 16 | 1 21/64" | CF | 1 × 10 -11 torr @ 72° F | 5/8" | Glass | 1 1/16" | 6 | 11/64" | 660° | 0000000 | 0000000 |
| 40 | 2 3/4" | CF | 1 × 10 -11 torr @ 72° F | 1 1/2" | Glass | 2 5/16" | 6 | 17/64" | 660° | 0000000 | 000000 |
| 63 | 4 1/2" | CF | 1 × 10 -11 torr @ 72° F | 2 9/16" | Glass | 3 5/8" | 8 | 21/64" | 660° | 0000000 | 000000 |
| 100 | 6" | CF | 1 × 10 -11 torr @ 72° F | 3 35/64" | Glass | 5 1/8" | 16 | 21/64" | 660° | 0000000 | 000000 |
